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Patent Searching and Data


Title:
CARRIER FOR CRYSTAL POLISHING MACHINE
Document Type and Number:
Japanese Patent JPH07328917
Kind Code:
A
Abstract:

PURPOSE: To reduce the thickness irregularity of a crystal plate after it is polished by forming holes for storing works on a carrier in a multi-ring shape, and forming the hole shape of the inside ring more polygonally than the hole shape of the outside ring.

CONSTITUTION: Holes 2 storing works are formed on a carrier 1 on multiple rings 3, 4. The shape of the holes 2 formed on the outside ring 3 is made an octagon, and the shape of the holes 2 of the inside ring 4 is made a decagon. When crystal plates are polished with the carrier 1 to be finished at the center frequency of 13.5MHz, for example, the crystal plates put in the holes 2 of both rings 3, 4 can be finished in the distribution of the center frequency of 13.5MHz ±20KHz. The number of the rings 3, 4 can be made more than two. When three rings are formed, the shape of the holes 2 of the innermost third ring is made a dodecagon.


Inventors:
MASUDA YUKIHIRO
Application Number:
JP23918593A
Publication Date:
December 19, 1995
Filing Date:
August 31, 1993
Export Citation:
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Assignee:
KINSEKI LTD
International Classes:
B24B1/00; B24B37/27; B24B37/28; (IPC1-7): B24B37/04; B24B1/00