CARRIER SUPPORT DEVICE, ALIGNMENT DEVICE, FILM DEPOSITION DEVICE, MASK MOUNTING METHOD, FILM DEPOSITION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Title:

CARRIER SUPPORT DEVICE, ALIGNMENT DEVICE, FILM DEPOSITION DEVICE, MASK MOUNTING METHOD, FILM DEPOSITION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Document Type and Number:

Japanese Patent JP2023021724

Kind Code:

A

Abstract:

To improve the precision in control over relative positions of a substrate carrier and a mask of a carrier support device which mounts the substrate carrier holding a substrate on the mask.SOLUTION: Carrier support means which supports a substrate carrier holding a substrate has: a plurality of first support parts which are provided side by side in a first direction along a film deposition surface of the substrate, and support a peripheral edge part of a first side of the substrate carrier along the first direction; and a plurality of second support parts which are provided side by side in the first direction and supports a peripheral edge part of a second side of the substrate carrier along the first direction, and the carrier support means supports the substrate carrier which is in an isolated state while some support surfaces of the plurality of first support parts are different in height from the other support surfaces of the plurality of first support parts and some support surfaces of the plurality of second support parts are different in height from the other support surfaces of the plurality of second support parts.SELECTED DRAWING: Figure 8

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