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Patent Searching and Data


Title:
CARRYING DEVICE, WORK CARRYING DEVICE, AND CONTROL METHOD OF CARRYING DEVICE
Document Type and Number:
Japanese Patent JP2003158165
Kind Code:
A
Abstract:

To provide a carrying device capable of efficiently carrying objects and high in rigidity despite a simple structure, a work carrying device for carrying work such as a wafer and a glass substrate with this carrying device between an original carrying position and a destination position where process is performed to this work, and a control method of this carrying device.

Upper arms 2a, 2b are pivotally coupled with a base 13 with the center on a horizontal axis H1, and front arms 3a, 3b are pivotally coupled with these upper arms 2a, 2b with the center on a horizontal axis H2. A hand member 4 provided with mount parts 42, 43 for disposing the object 1 to be carried is pivotally coupled with these front arms 3a, 3b with a center on a horizontal axis H3. The carrying device 11 is constituted so as to provide pivoting means 5a (51a to 62a), 5b pivoting the upper arms 2a, 2b, the front arms 3a, 3b, and the hand member 4 respectively. The upper face of the mount parts 42, 43 of the hand member 4 is formed to be horizontal constantly.


Inventors:
NAGAI TOSHIAKI
KARASAWA EIICHI
Application Number:
JP2001357585A
Publication Date:
May 30, 2003
Filing Date:
November 22, 2001
Export Citation:
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Assignee:
JUKI KK
International Classes:
B25J9/06; B65G49/07; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25J9/06; B65G49/07
Attorney, Agent or Firm:
Hiroshi Arafune (1 person outside)