CASSETTE MOUNTING STAND AND EQUIPMENT PROVIDED WITH CASSETTE MOUNTING STAND

Title:

CASSETTE MOUNTING STAND AND EQUIPMENT PROVIDED WITH CASSETTE MOUNTING STAND

Document Type and Number:

Japanese Patent JP2004363314

Kind Code:

A

Abstract:

To solve a problem that a wafer under carriage may possibly be damaged when a cassette is shifted from a mounting position, or mounted on a cassette mounting stand without releasing a stopper mechanism for preventing projection of a wafer frame being contained in the cassette.

The mounting stand utilizes a frame cassette 1 provided with a stopper mechanism for preventing projection of a wafer frame 3 by means of a rotary shaft 6 during carriage or utilizing a normal cassette. When the stopper mechanism is not released by an interference member 32 provided on the mounting surface of the cassette mounting stand 24 but the rotary shaft 6 interferes with the interference member 32 and the frame cassette 1 is floated or shifted from positioning members 29a and 29b and thereby not mounted appropriately, cassette sensors 26a and 26b detect inappropriate mounting to deliver a warm or inhibit carrying operation.

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Inventors:

AKIBA TORU

Application Number:

JP2003159731A

Publication Date:

December 24, 2004

Filing Date:

June 04, 2003

Export Citation:

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Assignee:

OLYMPUS CORP

International Classes:

B65D85/86; H01L21/673; H01L21/677; H01L21/68; (IPC1-7): H01L21/68

Attorney, Agent or Firm:

Takehiko Suzue
Satoshi Kono
Sadao Muramatsu
Tetsuya Kazama

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