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Title:
CERAMIC CHAMBER STRUCTURE AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP2000335973
Kind Code:
A
Abstract:

To obtain a ceramic chamber structure, and to provide a method for producing the ceramic chamber structure improved in molding yield as compared to conventional methods.

This ceramic chamber structure is produced by the following steps A to E: (A) ceramic material powder is press-molded into a plate, and a specified number of the resultant plate-like press-molded forms 3 are superposed on one another and laminated together through a joint paste to form a bonded form; (B) the bonded form thus obtained is calcinated to remove the binder into an interim conjugate; (C) the interim conjugate thus obtained or a combination of at least two interim conjugates 5, 7 is subjected to cutting work to the respective shapes of at least two divided forms from the aimed chamber structure; (D) the interim conjugates 9, 11, 13 thus subjected to cutting work are combined together to the objective chamber structure's shape and then baked to make an integrated conjugate; and (E) the integrated conjugate thus made is coated with a ceramic to complete the objective ceramic chamber structure.


Inventors:
OKAJIMA HISAKAZU
KAWASAKI KEIJI
Application Number:
JP2000079970A
Publication Date:
December 05, 2000
Filing Date:
March 22, 2000
Export Citation:
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Assignee:
NGK INSULATORS LTD
International Classes:
B32B7/12; B32B18/00; C04B35/565; C04B37/00; C23C16/32; H01L21/302; H01L21/3065; (IPC1-7): C04B35/565; B32B7/12; B32B18/00; C04B37/00; C23C16/32; H01L21/3065
Attorney, Agent or Firm:
Ippei Watanabe