To prevent a reverse flow of a constitutional element of individual slurry by a check valve in a distribution system, prevent mixing of a constitutional element through a separate distribution line, prevent solidification, and mix a manifold piece element in the vicinity as near as possible of a polishing roller.

A polishing machine distribution feeds an abrasive constitutional element from a vessel through check valves 164, 166, these constitutional elements are distributed through a part of manifold 168, to be mixed in a groove by a mixed element. This mixed abrasive is distributed to a polishing roller 132 by a partially divided flexible supply pipe 170. By mixing the constitutional element in the vicinity as near as possible of the check valve and a distribution point, the abrasive is prevented from being solidified in a distribution line, a line seal by generation of a particle is prevented. Only a part of pipe of a polishing system is exposed in the mixed abrasive, and since manufacturing cost of a pipe is low, even if solidification easily occurs, replacement can be performed at a low cost.