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Patent Searching and Data


Title:
STORAGE METHOD FOR ABRASIVE MATERIAL AND POLISHING METHOD
Document Type and Number:
Japanese Patent JPH10193255
Kind Code:
A
Abstract:

To provide a storage method for abrasive material of which dispersed abrasive grains aggregate to cause aged deterioration of a polishing speed.

To an abrasive material statically placed to be stored, after ultrasonic vibration is applied, a mean grain size of an abrasive grain is measured, and a polishing speed is controlled by supervising the mean grain size. In addition, by supervising oxidation reduction potential of the abrasive material, the polishing speed is controlled. From the means grain size after applying ultrasonic vibration, a permanent change of the polishing speed can be known. From the mean grain size and the oxidation reduction potential after applying the ultrasonic vibration, a polishing speed of a chemical machine abrasive material of metal can be known.


Inventors:
NAKAMURA WATARU
KISHII SADAHIRO
ARIMOTO YOSHIHIRO
Application Number:
JP318097A
Publication Date:
July 28, 1998
Filing Date:
January 10, 1997
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
B24B37/00; H01L21/304; (IPC1-7): B24B37/00; H01L21/304
Attorney, Agent or Firm:
Teiichi