Title:
クリーニング・チャンバおよびクリーニング装置
Document Type and Number:
Japanese Patent JP7312854
Kind Code:
B2
Abstract:
The present disclosure provides a cleaning chamber and a cleaning apparatus, including a chamber body and a carrying device and a spray device arranged in the chamber body. The carrying device is configured to carry the to-be-cleaned object. The spray device is arranged above and around the carrying device and configured to spray a cleaning fluid to the to-be-cleaned object. With the cleaning chamber and the cleaning apparatus provided by the present disclosure, the usage of the cleaning fluid may be reduced to reduce the cleaning cost.
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Inventors:
Chan, Hong Chiao
Lee, i-pin
Lee, i-pin
Application Number:
JP2021565970A
Publication Date:
July 21, 2023
Filing Date:
April 15, 2020
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
International Classes:
B08B3/02; H01L21/22
Domestic Patent References:
| JP2004230342A |
Foreign References:
| US2471506 | ||||
| US20060237054 | ||||
| CN106824929A | ||||
| CN207170391U |
Attorney, Agent or Firm:
Patent Attorney Corporation Shinei Office