Title:
フッ化物に基づく洗浄組成物
Document Type and Number:
Japanese Patent JP7291695
Kind Code:
B2
Abstract:
The present invention relates to a cleaning composition comprising a) from 1 to 5% by weight of total weight of the composition of ammonium fluoride; b) from 30 to 70% by weight of total weight of the composition of a water soluble organic solvent; c) from 1.5 to 20% by weight of total weight of the composition of organic amine; and d) from 31 to 60% by weight of total weight of the composition of deionised water. A cleaning composition according to the present invention provides good cleaning efficacy, while being gentle cleaning composition and having a stable pH.
Inventors:
Takuma Kochi
Kazuo Kikuchi
Atsushi Ohtake
Kazuo Kikuchi
Atsushi Ohtake
Application Number:
JP2020524433A
Publication Date:
June 15, 2023
Filing Date:
November 02, 2018
Export Citation:
Assignee:
Henkel AG & Co. KGaA
International Classes:
C11D7/10; C11D7/26; C11D7/32; C11D7/34; C11D7/50; H01L21/304
Domestic Patent References:
| JP2007200944A | ||||
| JP2007128038A | ||||
| JP2014084464A | ||||
| JP2006049860A |
Attorney, Agent or Firm:
Michiko Matsutani
Kenichi Morizumi
Kenichi Morizumi