PURPOSE: To efficiently collect quartz glass powder without mixing, impurities by sticking synthesized quartz glass powder synthesized in a vapor phase on the surfaces of many partition walls which are made of quartz or metallic silicon and cooled and scraping down it with a scraping tool.
CONSTITUTION: Many partition walls 7 are provided so that a gas flow path 6 wherein the synthesized quartz powder synthesized in the vapor phase flows is allowed to meander and also the wall surfaces of the partition walls 7 are constituted of quartz, a material coated with quartz, metallic silicon or a material coated with metallic silicon and constituted so that the partition walls 7 can be cooled by passing a refrigerant through a cooling pipe buried in the inner part. The synthesized quartz glass powder synthesized powder in the vapor phase is stuck on the partition walls 7 and scraped down with the rodlike scraping tools 8 and the scraped synthesized quartz glass powder 9 is housed in a housing vessel 10.
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ORIMO KATSUMI
IINO AKIRA