PURPOSE: To obtain the titled large-sized deposit stably and easily in excellent yield without generating a crack by using a hydrogen compd. of Si wherein the heat of reaction is higher than SiCl4 as the raw material of glass for producing the glass fine granular deposit.
CONSTITUTION: One and more compds. of hydrogen compds. of Si such as SiHCl3, SiH2Cl2 and SiH4 wherein the reactivity is better and the heat of reaction is higher than SiCl4 and SiCl4 in accordance with the necessity are fed as a raw material to a burner 3 for synthesizing the glass fine grains and burned together with H2, O2 and Ar, etc. and allowed to react with each other. The large-sized glass fine granular deposit 2 is formed by accumulating the generated glass fine grains on an outside periphery part of a columnar starting material 1 such as a rotating quartz glass tube.
YOKOTA HIROSHI
TSUCHIYA ICHIRO
| JPS542653A | 1979-01-10 |
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