PURPOSE: To perform automatically the continuous operation of a positioning, a transfer and a measurement of a component, such as an IC or the like, and a decision on the component and to carry out an inspection of leads in a non- contact state and at high speed.
CONSTITUTION: In an image obtained by imaging a component 1 by a TV camera 21, the inclination of the component is detected on the basis of a reference line to respond to the set form of the component and a θ stage 11 is rotationally driven, whereby the component is precisely positioned and at the same time, the length between lead tips is calculated to measure a lead length and after that, the component is moved directly under a three-dimensional visual sensor 22 by the translational drive of an XY stage 12. Slit light is projected on the component by the sensor 22, the representative point of each lead is decided from a slit light figure formed by the reflected light of the slit light and a lead height and a lead pitch are measured on the basis of the position of the representative point.
NAKANO TOMOAKI
KOSEKI OSAMU
YAMAMOTO ARATA
