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Patent Searching and Data


Title:
COMPOSITION OF POLYURETHANE POLISHING PAD MEMBER
Document Type and Number:
Japanese Patent JP2011212775
Kind Code:
A
Abstract:

To provide a polyurethane polishing pad with higher hardness and high durability since durability of a pad and high speed polishing besides polishing accuracy are required in precision polishing field recently.

The polyurethane polishing pad with hardness higher than that of a conventional one and achieving hard finishing is obtained by changing a TDI base isocyanate group-terminated prepolymer to an isocyanate group-terminated prepolymer mainly composed of 2, 4'-diphenylmethane diisocyanate. A problem is solved by allowing the polyurethane polishing pad to have high polishing accuracy and to have both the durability and the polishing speed.


Inventors:
NOMURA KOJI
Application Number:
JP2010082002A
Publication Date:
October 27, 2011
Filing Date:
March 31, 2010
Export Citation:
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Assignee:
NIPPON POLYURETHANE KOGYO KK
International Classes:
B24B37/24; C08G18/32; H01L21/304; C08G101/00