Title:
CONNECTION DEVICE AND CONNECTION METHOD
Document Type and Number:
Japanese Patent JP2010203778
Kind Code:
A
Abstract:
To speedily and certainly detect leakage of gas or liquid by a relatively simple inspection unit independent from a piping system of a semiconductor production apparatus even when piping for supplying or discharging with relatively less importance or risk on human bodies and environment.
The connection device 1 includes a pipe support 10 which has an easily breakable conductive part 11 and forms a continuity loop of the conductive part by supporting connected piping and a breakage detection part 20 which is electrically connected to the conductive part 11 and electrically detects a breakage of the conductive part 11 based on disconnection of the continuity loop.
Inventors:
ITO TAKESHI
Application Number:
JP2009046395A
Publication Date:
September 16, 2010
Filing Date:
February 27, 2009
Export Citation:
Assignee:
FUJITSU SEMICONDUCTOR LTD
International Classes:
G01M3/16; F17D5/06
Attorney, Agent or Firm:
Takayoshi Kokubun
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