To provide a contact type shape measuring apparatus and method, in which variation of a contact force or floating of a probe, which is caused by the fact that an inertia force is acted in a direction in which the probe is separated from or approaches a surface to be measured, is reduced so as to perform high-precision measurement.
In a contact type shape measuring apparatus having a probe and a stage for supporting the probe, in which by applying, while conveying the stage in a first direction, a prescribed contact force to the probe in a second direction different from the first direction, the probe is scanned along the surface to be measured to thereby measure a surface shape of the surface to be measured, there are provided gradient variation quantity derivation means for deriving a gradient variation quantity of the surface to be measured in the second direction in accordance with the conveyance quantity in the first direction, and correction force calculation means for calculating a correction force in a direction identical to the direction of the gradient variation quantity, and measurement is performed by adding a correction force to the prescribed contact force.
| JP2012112780A | 2012-06-14 | |||
| JPH10197235A | 1998-07-31 | |||
| JP2009501321A | 2009-01-15 |
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka