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Title:
CORROSION PREVENTIVE AGENT FOR METAL AND WASHING LIQUID COMPOSITION INCLUDING THE SAME AS WELL AS WASHING METHOD USING THE SAME
Document Type and Number:
Japanese Patent JP2001026890
Kind Code:
A
Abstract:

To obtain a corrosion preventive agent for a washing liquid which does not have corrosion resistance to tungsten and is optimum for metal washing by including ≥1 kind of the compounds selected from triazoles, polyethylene imine and polyamine sulfone into this agent.

This corrosion preventive agent for metals includes the compounds selected from the triazoles containing one amino group or thiol group, the polyethylene imine and the polyamine sulfone expressed by the formula (in the formula, R1, R2 are H, CH3, C2H5 or CH2C6H5, X- is an anionic group and n is 30 to 200). More preferably, the triazoles are 3-aminotriazole; the polyethylene imine is of 300 to 10,000 in molecular weight. The polyamine sulfone is of hydrogen in R1 and R2. The washing liquid composition not having the corrosion resistance to the metals and more particularly the tungsten may be provided by mixing this preventive agent with the washing liquid.


Inventors:
OTA KOJI
TAKASHIMA MASAYUKI
Application Number:
JP19647299A
Publication Date:
January 30, 2001
Filing Date:
July 09, 1999
Export Citation:
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Assignee:
ASAHI KAGAKU KOGYO CO LTD
SUMITOMO CHEMICAL CO
International Classes:
B08B3/08; C11D7/04; C11D7/32; C11D7/34; C11D7/54; C11D17/08; C23F11/00; C23G1/06; C23G1/18; H01L21/304; (IPC1-7): C23G1/18; B08B3/08; C11D7/04; C11D7/32; C11D7/34; C11D7/54; C11D17/08; C23F11/00; C23G1/06; H01L21/304
Attorney, Agent or Firm:
Nishikyo Keiichiro