DEFECT DETECTING DEVICE AND METHOD - KANAGAWA KAGAKU GIJUTSU AKAD

Title:

DEFECT DETECTING DEVICE AND METHOD

Document Type and Number:

Japanese Patent JP2002122551

Kind Code:

A

Abstract:

To correctly detect micro-defects smaller than before in a defect detecting device and method.

The defect detecting device is provided with a rotation driving device 2 for rotating an inspection body 1 with an inspection plane 11 at a predetermined speed, a slider 5 which floats over the inspection plane 11 by a predetermined amount through the use of an airflow generated over the inspection plane when the inspection body 1 is rotated, an optical fiber 4 attached to the slider 5 for generating near-field light toward the inspection plane 11 and detecting the reflected light of the near-field light reflected by the inspection plane 11, and a light intensity detecting means 7 for detecting the intensity of the reflected light detected by the optical fiber 4.

Inventors:

SAIKI TOSHIHARU
KUDO SHIGEKI
NOMURA KAZUO
OKITSU NOBUHIKO

Application Number:

JP2000317691A

Publication Date:

April 26, 2002

Filing Date:

October 18, 2000

Export Citation:

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Assignee:

KANAGAWA KAGAKU GIJUTSU AKAD
MITSUBISHI CHEM CORP

International Classes:

G01B11/30; G01N21/95; G01Q10/04; G01Q60/18; G01Q60/22; G01Q70/02; (IPC1-7): G01N21/95; G01B11/30; G01N13/14; G12B21/06

Attorney, Agent or Firm:

Yu Sanada

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