To provide a device determining the acceptability of a probe for a scanning probe microscope determining whether probe is acceptable or not independent of experience and subjectivity of measuring person, quantitatively, objectively, and easily.
A scanning probe microscope is provided with a cantilever 16 with a probe 15 on a free end, and a Z axis piezoelectric element 14b changing the distance between the probe 15 and a specimen 11. This device is provided with a control part 31 applied to the scanning probe microscope, and makes the probe and the specimen positioned in a distance closer, in contact, and pressed against each other by extending the Z axis piezoelectric element, then separate the probe and the specimen by contracting the Z axis piezoelectric element, and a determining part 32 whether the probe is acceptable or not. The determining part 32 measures a focus curve by receiving a signal representing the displacement of the cantilever and a signal controlling the motion of the Z axis piezoelectric element as input when the control part 31 changes the distance between the probe and the specimen, and detects an attracting force applied to the probe due to the surface of the specimen obtained by the focus curve, thereby determining whether the probe is acceptable or not.
MURAYAMA TAKESHI
KURODA HIROSHI
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