Title:
DEVICE AND METHOD FOR INSPECTION OF HARD DISK SURFACE FOR PATTERNED MEDIA
Document Type and Number:
Japanese Patent JP2011129208
Kind Code:
A
Abstract:
To provide a device and method for inspection of a hard disk surface for patterned media, wherein a servo area is set and a defect of at least a data area can be detected from among the servo and data areas.
When a hard disk surface in which a pattern is formed in the servo and data areas is two-dimensionally scanned and irradiated with light to detect a defect of the hard disk surface by receiving the scattered light from the hard disk surface, the servo area is set on the basis of first scattered light out of the scattered light from the servo area, and second scattered light out of the scattered light from the data area is extracted on the basis of the set results to detect the defect of the data area.
Inventors:
SERIKAWA SHIGERU
FUNAKI TOSHIJI
HORIE KIYOTAKE
KATO HIROHITO
FUNAKI TOSHIJI
HORIE KIYOTAKE
KATO HIROHITO
Application Number:
JP2009287671A
Publication Date:
June 30, 2011
Filing Date:
December 18, 2009
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
G11B5/84; G01B11/30; G01N21/956
Domestic Patent References:
| JP2009150832A | 2009-07-09 | |||
| JP2008268189A | 2008-11-06 | |||
| JP2005274156A | 2005-10-06 | |||
| JP2000180376A | 2000-06-30 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation