Title:
DIFFERENTIAL PRESSURE SENSOR CHIP, DIFFERENTIAL PRESSURE TRANSMITTER, AND METHOD FOR MANUFACTURING DIFFERENTIAL PRESSURE SENSOR CHIP
Document Type and Number:
Japanese Patent JP2018159593
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To realize a differential pressure transmitter at a lower cost having a differential pressure sensor chip in which a necessary amount of a pressure transmission material is sufficiently sealed.SOLUTION: A differential pressure sensor chip 2 according to the present invention includes: a first pressure introduction hole 21_1 and a second pressure introduction hole 21_2; a first diaphragm 23_1 and a second diaphragm 23_2 over the first and second pressure introduction holes; a first recessed part 24_1 and a second recessed part 24_2 facing the first pressure introduction hole and the second pressure introduction hole respectively across the first and second diaphragms; a first communication path 25 for connecting the room between the first recessed part and the first diaphragm and the room between the second recessed part and the second diaphragm; a pressure transmission material introduction path 26, an end of which is opened and the other end is connected to first communication path; a pressure transmission material 27 filled in the first communication path, in the two rooms, and in the pressure transmission material introduction path; and a sealing metal member 7 on a metal layer 9 formed on the surface of the opening of the pressure transmission material introduction path, the sealing member sealing the recess part.SELECTED DRAWING: Figure 1
Inventors:
TSUSHIMA AYUMI
ISHIKURA YOSHIYUKI
TOKUDA TOMOHISA
ISHIKURA YOSHIYUKI
TOKUDA TOMOHISA
Application Number:
JP2017056190A
Publication Date:
October 11, 2018
Filing Date:
March 22, 2017
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01L13/02; H01L29/84
Domestic Patent References:
| JP2013190325A | 2013-09-26 | |||
| JP2014126423A | 2014-07-07 | |||
| JP2010540903A | 2010-12-24 | |||
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Foreign References:
| DE10249238A1 | 2004-05-13 |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa