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Patent Searching and Data


Title:
DIGITAL SWITCHING CIRCUIT IN MOS TECHNOLOGY
Document Type and Number:
Japanese Patent JPH11186507
Kind Code:
A
Abstract:

To generate only a slight coupling and noise processes by forming one strip of a strip conductor from a metal strip conductor on a dielectric layer, and by forming the other strips as the doping tab regions in the lower regions of the metal strip conductor.

A microwave strip conductor 2, consisting of a metal strip conductor 3 and a doping tab area 4, is provided on a semiconductor substrate 1. The doping tab region 4 is provided in the lower area of the metal strip conductor 3 of the semiconductor substrate 1 and may be formed through diffusion. A dielectric layer 5 of silicon dioxide, for example, is provided between the metal strip conductor 3 and the doping tab region 4. In this way, the conductor 2 comprising the metal strip conductor 3 and the doping tab region 4 transfers the signal energy to the region of the dielectric layer 5 between the metal strip conductor 3 and doping tab region 4.


Inventors:
BUCK MARTIN
Application Number:
JP20925798A
Publication Date:
July 09, 1999
Filing Date:
July 24, 1998
Export Citation:
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Assignee:
SIEMENS AG
International Classes:
H01L21/822; H01L23/52; H01L23/66; H01L27/04; H01P1/15; H01L21/3205; H03K17/16; (IPC1-7): H01L27/04; H01L21/822; H01L21/3205; H01P1/15; H03K17/16
Attorney, Agent or Firm:
Toshio Yano (3 outside)