To provide a draining system of a film workpiece in which the simplification of the structure of the entire system and the miniaturization are aimed at, the moisture of the workpiece front and rear surfaces is removed surely, and the improvement of the yield and the productivity are enabled.
The wash system includes: draining heads 200A, 200B that have: jetting units 202A, 202B that jet high pressure air from a spray nozzle to one surface direction of a workpiece W; and suction units 203A, 203B that suction high pressure air reaches one surface of the workpiece W from a suction nozzle; supply side air flow channels 103, 106A, 106B that supply high pressure air to the jetting units; recovery side air flow channels 107A, 107B, 108 that recover high pressure air that has been suctioned; a means that transports the workpiece W, wherein the workpiece is transported so as to pass sequentially near the draining heads 200A, 200B, thereby moisture that has been torn off from the front and rear surfaces of the workpiece W by high pressure air is recovered with high pressure air through the suction nozzle and the recovery side air flow channels.
ITO TAKAHIRO
HUGLE ELECTRONICS INC
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JP2005016837A | 2005-01-20 |
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