Title:
DRESS BOARD HOLDING TABLE AND CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2011009324
Kind Code:
A
Abstract:
To provide a dress board holding table in which a warp of a dress board at dressing time is effectively prevented without increasing a suction amount and which continues appropriate dressing and to provide a cutting device.
The dress board holding table includes a suction face 66 sucking and holding the dress board 71 dressing a cutting blade 41 by cutting the cutting blade 41 and an engaging part 63 which is engaged with one end side of the dress board 71 and suppresses the warp at one end side of the dress board. A suction region formed on the suction face 66 is formed so that it increases from one end side of the dress board 71 to the other end side, and suction force is biased to the other end side of the dress board 71.
More Like This:
Inventors:
NOMURA YUKI
Application Number:
JP2009149351A
Publication Date:
January 13, 2011
Filing Date:
June 24, 2009
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B24B53/00
Domestic Patent References:
| JPH07169720A | 1995-07-04 | |||
| JP2000049120A | 2000-02-18 | |||
| JP2006041245A | 2006-02-09 | |||
| JPH0592365A | 1993-04-16 | |||
| JP2008300556A | 2008-12-11 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi