Title:
ULTRAVIOLET SENSOR
Document Type and Number:
Japanese Patent JP2011009323
Kind Code:
A
Abstract:
To provide an ultraviolet sensor having the characteristic that UV sensitivity is high in a desired wavelength region.
The ultraviolet sensor 1 is provided with a substrate 2 constituted of an oxide semiconductor, an internal electrode 6 formed in the substrate 2 and an external electrode 3 formed in a prescribed shape in a prescribed region 3a on one face of the substrate 2. The external electrode 3 is formed in a shape where a length of a boundary line of the substrate 2 and the external electrode 3 becomes longer than that of the circumference of the prescribed region 3a. The substrate 2 comprises the oxide semiconductor where ZnO is incorporated into NiO as solid solution.
Inventors:
HAYASHI GOJI
ANDO MASAMICHI
TANAKA NOBUHIKO
ANDO MASAMICHI
TANAKA NOBUHIKO
Application Number:
JP2009149340A
Publication Date:
January 13, 2011
Filing Date:
June 24, 2009
Export Citation:
Assignee:
MURATA MANUFACTURING CO
International Classes:
H01L31/0264
Attorney, Agent or Firm:
Masaya Fukunaga
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