Title:
液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器
Document Type and Number:
Japanese Patent JP4347187
Kind Code:
B2
Abstract:
A function liquid droplet ejection apparatus includes an imaging apparatus for performing imaging on a workpiece with a function liquid droplet ejection head and a maintenance apparatus for performing maintenance of the function liquid droplet ejection head. The imaging apparatus includes: an X-axis table having the workpiece mounted thereon and moving the workpiece in the X-axis direction; a plurality of carriage units having the function liquid droplet ejection head mounted on a carriage; and a Y-axis table moving the plurality of, carriage units between an imaging area and a maintenance area. The Y-axis table is capable of moving the plurality of carriage units independently.
Inventors:
Kenji Sakamoto
Application Number:
JP2004299439A
Publication Date:
October 21, 2009
Filing Date:
October 13, 2004
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B05C5/00; B41J2/18; B41J2/01; B41J2/165; B41J2/185; G02B5/20; G02F1/133; H01L51/00; H04M1/02; H05B33/10
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Attorney, Agent or Firm:
Minoru Ochiai