Title:
STRUCTURE OF AMBIENCE GAS SENSOR
Document Type and Number:
Japanese Patent JP3124609
Kind Code:
B2
Abstract:
PURPOSE: To make the temperature distribution of a heat generating resistance body uniform and to detect an ambience gas with high sensitivity by bridging in a manner to make the transmission of heat to a substrate small when the heat generating resistance body as a detecting part of the ambience gas is heated.
CONSTITUTION: A generally square insulating body 12 of a thin film is arranged above a recessed part 11 of a silicon substrate 10. The thin film insulating body 12 is bridged and supported on diagonal lines of the substrate 10. The width of a bridging part, 12a is made smaller than the length of the side of the square and, a heat, generating resistance body 13 formed on the thin film insulating body 12 is connected by a substrate pad part 13a and a lead part 13b.
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Inventors:
Junji Manaka
Application Number:
JP2045892A
Publication Date:
January 15, 2001
Filing Date:
January 08, 1992
Export Citation:
Assignee:
Ricoh Elemex Co., Ltd.
International Classes:
G01N27/18; (IPC1-7): G01N27/18
Domestic Patent References:
| JP196549A | ||||
| JP61235726A | ||||
| JP1203957A | ||||
| JP6060547A | ||||
| JP62203051A |
Attorney, Agent or Firm:
Akichika Takano