Title:
GAS CONCENTRATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/193725
Kind Code:
A1
Abstract:
A sensor part (11) is configured having a sensor substrate (100) and a cap substrate (200) joined to the sensor substrate (100). The sensor substrate (100) is configured such that a diaphragm part (105) is configured on one surface (100a) side of the sensor substrate (100), a heat-generating resistor (RH) and detection resistors (RA, RB) are formed in the diaphragm part (105) on the one surface (100a) side, reference resistors (RS, RT) are formed in a different portion than the diaphragm part (105), and a first connection wiring layer (HA) connected to the heat-generating resistor (RH), and a second connection wiring layer (HB) which is connected to the detection resistors (RA, RB) and the reference resistors (RS, RT) and which constitutes a bridge circuit are furthermore formed. The cap substrate (200) is configured so as to be joined to the sensor substrate (100) to seal the heat-generating resistor (RH), the detection resistors (RA, RB), the reference resistors (RS, RT), the first connection wiring layer (HA), and the second connection wiring layer (HB).
Inventors:
HASEGAWA NAOKI (JP)
SHIRAISHI YOSHIHIKO (JP)
KAWAI YUSUKE (JP)
SHIRAISHI YOSHIHIKO (JP)
KAWAI YUSUKE (JP)
Application Number:
PCT/JP2021/012262
Publication Date:
September 30, 2021
Filing Date:
March 24, 2021
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01N25/18; G01N27/18
Domestic Patent References:
| WO2019048202A1 | 2019-03-14 |
Foreign References:
| JP2015004609A | 2015-01-08 | |||
| JP2010236983A | 2010-10-21 | |||
| CN110108757A | 2019-08-09 | |||
| JPH08136490A | 1996-05-31 | |||
| JP2016042070A | 2016-03-31 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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