Title:
弾性波デバイスおよびその製造方法
Document Type and Number:
Japanese Patent JP6991763
Kind Code:
B2
Abstract:
To achieve high electric power proofness.SOLUTION: The elastic wave device includes: a piezoelectric substrate 10 and a plurality of electrode fingers 14 exciting an elastic wave having: a first metal film 12b using first metal formed on the piezoelectric substrate 10 as a main constituent; a second metal film 12c formed in contact with the first metal film 12b, using second metal with a higher melting point than the first metal as a main constituent and containing oxygen.SELECTED DRAWING: Figure 2
Inventors:
Fumiya Matsukura
Naokawa Kawahara
Kentaro Nakamura
Takashi Matsuda
Naokawa Kawahara
Kentaro Nakamura
Takashi Matsuda
Application Number:
JP2017139259A
Publication Date:
January 13, 2022
Filing Date:
July 18, 2017
Export Citation:
Assignee:
TAIYO YUDEN CO.,LTD.
International Classes:
H03H9/145; H03H3/08; H03H9/25; H03H9/64; H03H9/72
Domestic Patent References:
| JP2003283282A | ||||
| JP2002026685A | ||||
| JP2003078384A | ||||
| JP2011114826A | ||||
| JP2005253034A | ||||
| JP10022766A |
Foreign References:
| WO2004114521A1 |
Attorney, Agent or Firm:
Shuhei Katayama