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Title:
電界吸収型光変調器及びその製造方法
Document Type and Number:
Japanese Patent JP7301709
Kind Code:
B2
Abstract:
To ensure appropriate carrier density.SOLUTION: An electric field absorption optical modulator includes multiple layers including a plurality of quantum well layers 26 and a plurality of barrier layers 24 alternately laminated, and further comprises: a multiple quantum well 22 containing an acceptor and a donor in the plurality of quantum well layers 26 and the plurality of barrier layers 24; a p-type semiconductor layer 28 in contact with a plurality of top layers; and an n-type semiconductor layer 20 in contact with multiple layers of the bottom layers. The multiple quantum well 22 has p-type carrier density of 10% or more and 150% or less with respect to that of the p-type semiconductor layer 28. The multiple quantum well 22 has effective carrier density, corresponding to a difference between the p-type carrier density and the n-type carrier density, of ±10% or less with respect to the p-type carrier density of the multiple quantum well 22.SELECTED DRAWING: Figure 3

Inventors:
Atsushi Nakamura
Ken Kitatani
Kaoru Okamoto
Shigenori Hayakawa
Application Number:
JP2019184664A
Publication Date:
July 03, 2023
Filing Date:
October 07, 2019
Export Citation:
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Assignee:
Nippon Lumentum Co., Ltd.
International Classes:
G02F1/017; H01S5/026
Domestic Patent References:
JP63269119A
JP2018054727A
JP2015175901A
JP8327957A
JP10022570A
JP2000353849A
JP10326942A
JP2011159752A
Foreign References:
CN101738748A
Attorney, Agent or Firm:
Patent Attorney Corporation Haruka International Patent Office