To provide an electrode device for circuit device inspection, capable of forming electrodes for connection with a small arrangement pitch, while having mutually satisfactory insulation property, and having a small contact resistance, its manufacturing method, and an inspection device of the circuit device, capable of performing high-accuracy expected electrical inspection, relative to all the electrodes to be inspected, even when a circuit device, where the arrangement pitch of the electrodes to be inspected is small or the number of the electrodes, is large.

The electrode device is equipped with an insulating substrate, the plurality of electrodes for connection arranged on each prescribed position on its surface side and having a flat back surface, and a plurality of electric wires wherein each one end face is integrally connected to the back surface of the electrode for connection, in a state where each one end is fixed penetratingly and elongating through the insulating substrate in the thickness direction. The inspection device is equipped with the electrode device for circuit device inspection.

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