To provide an electrode structure for a piezoelectric vibrator such as, mainly a quartz oscillator.

The excitation electrode structure of the piezoelectric vibrator has following structure. A main electrode layer is laminated on a titanium nitride layer, as a ground electrode on a piezoelectric base board; the main electrode layer is laminated on a titanium oxide layer, as the ground electrode on the piezoelectric base board; the main electrode layer is laminated on a titanium layer as the ground electrode, on the piezoelectric base board; or a three-layer electrode structure is included, which has on the piezoelectric base board a layer having a titanium nitride/oxide layer, or a titanium material as the first ground electrode, has an electrode layer constituted of the material other than that of the first ground electrode as the second ground electrode, and has the main electrode layer to be laminated on the top.