To form a conductive pattern or an electrode conductor with a prescribed film thickness, matching the usage place of and electronic part having a humidity detecting function and to form an electrode conductor even in a part with a high aspect ratio, in addition to improvement in conductor pattern printing accuracy.
On the main face of an insulated base board 20, pattern-printing of non-photosensitive conductive paste is carried out by means of a screen printer and the like for forming a soldering electrode conductor part 21, and when highly a accurate patterning of photosensitive conductive paste in the comb shape is carried out through exposure and development, with a part of it being overlapped to the soldering electrode conductor part 21, a comb-shaped electrode conductor part 23 is formed. A pair of these comb-shaped electrode conductor parts 23 are formed, so as to face each other across a minute gap and serve humidity detecting electrode conductive parts to be covered with a humidity sensitive film, and the humidity sensitive film 25 is arranged so as to cover a pair of comb-shaped electrode conductive parts 23. The humidity sensitive film 25 is constructed of a polymer film, including a dissociative ions such as halogen ion.
AIZAWA KENJI
TAKAHASHI ATSUKO
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