To detect and measure a detection objective gas concentration in a tested gas, such as ozone without having to use reaction promoters, such as a catalyst.
A temperature of a sensor is set to be higher than a thermal cracking temperature of a test objective gas sort and to be a temperature which suppresses a reaction, causing variations in a detection property, so that oxidative decomposition of the detection objective gas is progressed without using any reaction promoter such as a catalyst, and then the concentration of the test objective gas in the tested gas is measured. In this case, two gas sensors are used, and one of the gas sensors measures a temperature change due to decomposition heat, when the element is heated at a temperature above the decomposition heat, while the other sensor eliminates influence of a temperature change of the tested gas without being influenced by the reaction heat due to thermal decomposition, when its temperature is set to a room temperature or to be slightly higher than the room temperature.
NAKAGAWA HIDEMOTO
OKAZAKI SHINJI
SHIMIZU HIRONORI
IWAMOTO ISAMU
ASAKURA SHUKUJI
NAKAGAWA HIDEMOTO
OKAZAKI SHINJI