To provide a TEG capable of feeding evaluation contents back at an early stage, and to provide an evaluating method using the TEG.
A TFT in the TEG is manufactured on a substrate different from that for a TFT on a real panel by using steps, liable to generate variation of characteristics, and selected from the manufacturing steps for the TFT on the real panel and the minimally required steps for manufacturing a TFT. The TFT in the TEG can be completed sooner than that on the real panel because the number of steps in the TEG is fewer than that on the real panel, and the evaluation test results of TFT characteristics can sooner be fed back to the manufacturing steps for the real panel. Therefore, the time and the cost required by the manufacturing steps for the panel can be suppressed.
AKIBA MAI
JPS61220454A | 1986-09-30 | |||
JPH0410660A | 1992-01-14 | |||
JPS6092653A | 1985-05-24 |
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