Title:
エッチング方法
Document Type and Number:
Japanese Patent JP4421103
Kind Code:
B2
Inventors:
Fukino Yasuhiko
Hideyuki Nonaka
Hideyuki Nonaka
Application Number:
JP2000398506A
Publication Date:
February 24, 2010
Filing Date:
December 27, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/28; H01L21/336; H01L21/302; H01L21/3065; H01L29/786
Domestic Patent References:
| JP10073841A | ||||
| JP9153618A | ||||
| JP8124911A | ||||
| JP2000235968A |
Foreign References:
| WO1999012195A1 |
Attorney, Agent or Firm:
Hiroshi Takayama