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Title:
半導体装置の作製方法
Document Type and Number:
Japanese Patent JP4421104
Kind Code:
B2
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Inventors:
Shunpei Yamazaki
Osamu Nakamura
Kajiwara Nobuyuki
Junichi Koizuka
Application Number:
JP2000403098A
Publication Date:
February 24, 2010
Filing Date:
December 28, 2000
Export Citation:
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Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
G02F1/1368; H01L21/20; H01L21/322; H01L21/336; H01L29/786
Domestic Patent References:
JP1154760A
JP10242475A
JP2000133594A
JP5109737A
JP10135226A
JP10223534A
JP11329970A
JP8236471A
JP2001250777A



 
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