To provide an evaluation method and evaluation device capable of automatically accurately and rapidly judging weak contrast defects, the so-called stain and unevenness, causing serious problems in images in a solid state imaging element.

Image data from the solid state imaging element is used to provide, as one set, a binary threshold value that takes a difference of thickness as an index, and an area value that takes a defect feature amount as an index. At least two sets of these values are combined to discriminate a point-shaped defect having an equivalent thickness difference to a defect object and high frequency band noise from stain and unevenness, for judgement of acceptance of the solid state imaging element.