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Title:
EXHAUST PIPE FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2005109383
Kind Code:
A
Abstract:

To enhance the maintainability of a trapping means for mixtures in an exhaust gas which cause the overload stoppage of a pump for a reduced-pressure exhaust system.

The trapping means 70 for mixtures in the exhaust gas is installed in an exhaust pipe 60 that connects a mechanical booster pump 40 and a dry pump 50. In addition, an inspection means 80 for the trapping means 70 is installed in the exhaust pipe 60. By adopting such a configuration, the maintenance of the trapping means 70 can be performed without removing the dry pump 50 and the exhaust pipe 60, and hence the efficiency of the maintenance can be enhanced markedly as compared to the case in which the maintenance is performed after removing the dry pump 50 and the exhaust pipe 60.


Inventors:
MIYAMOTO YUUKI
YONEKAWA MAMORU
HONDA TOMOO
Application Number:
JP2003344110A
Publication Date:
April 21, 2005
Filing Date:
October 02, 2003
Export Citation:
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Assignee:
RENESAS TECH CORP
International Classes:
C23C16/44; H01L21/205; (IPC1-7): H01L21/205; C23C16/44
Domestic Patent References:
JP2001131748A2001-05-15
JPH0645260A1994-02-18
JPH09251981A1997-09-22
JPH02290223A1990-11-30
JP2003224119A2003-08-08
Attorney, Agent or Firm:
Yamato Tsutsui



 
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