To provide a step-and-repeat type exposure device which can prevent in advance occurrence of failure due to misrecognition of a shot of a rough alignment object.

A step-and-repeat type exposure device includes a movable type sample table 14, a sample table control unit 4 performing movement control of the sample table and a main control unit 2 controlling the whole device, and repeatedly performs positioning processing and exposure processing on a sample placed on the sample table 14 by moving an exposure object section in the sample. The exposure device further includes a positioning error detection unit 3 detecting a positioning error in the positioning processing. When an operator manually performs a positioning operation in accordance with occurrence of the positioning error, if the sample table 14 moves in excess of a constant value by the manual operation of the operator with the position of the sample table at the occurrence of the positioning error as a reference, the sample table control unit 4 detects the movement in excess of the constant value, and the sample table control unit 4 or the main control unit 2 performs control to issue a warning indicating the occurrence of the movement in excess of the constant value.