PURPOSE: To obtain a face alignment method in which a scanning face and the surface of a recording medium are made precisely parallel even in a high- speed scanning operation.
CONSTITUTION: By using a branching filter 41, a signal indicating a tunneling current is divided into a plurality of frequency bands including an arbitrary frequency region. Out of the plurality of divided frequency bands, a frequency (the natural frequency of a moving part for an X-Y-direction fine and coarse movement mechanism 22) which originates from the inclination of a recording medium 1 is selected, and the inclination of the recording medium 1 is corrected fine by using a second tilt mechanism 21 in such a way that the amplitude of the selected frequency becomes zero as far as possible. Concretely, a prescribed voltage is applied to a piezoelectric element constituting the second tilt mechanism 21, and the inclination of the recording medium 1 is corrected fine.
MIYAZAKI TOSHIHIKO
KURODA AKIRA
KAWASE TOSHIMITSU
SHITO SHUNICHI
SAKAI KUNIHIRO
OGUCHI TAKAHIRO
YAMANO AKIHIKO
