Fe-Co-B-BASED ALLOY TARGET MATERIAL AND METHOD FOR PRODUCING THE SAME

Title:

Fe-Co-B-BASED ALLOY TARGET MATERIAL AND METHOD FOR PRODUCING THE SAME

Document Type and Number:

Japanese Patent JP2006265654

Kind Code:

A

Abstract:

To provide a low permeability Fe-Co-B-based alloy target material having satisfactory sputtering properties for depositing a soft magnetic film used for a perpendicular magnetic recording medium or the like.

The Fe-Co-B-based alloy target material is expressed by the compositional formula of ((FeXCo(100-X))100-YMY)100-ZBZ by atomic ratio, wherein M is an element selected from the groups 4a, 5a, 6a, 7a and 8 (excluding Fe and Co), and 55≤X≤75, 0<Y≤20, and 5≤Z≤15 are satisfied.

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Inventors:

UENO TOMONORI
TAKASHIMA HIROSHI
FUJIMOTO MITSUHARU

Application Number:

JP2005086853A

Publication Date:

October 05, 2006

Filing Date:

March 24, 2005

Export Citation:

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Assignee:

HITACHI METALS LTD

International Classes:

C23C14/34; B22F3/14; B22F3/15; B22F9/08; C22C33/02; C22C38/00

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