Title:
膜厚測定方法および装置
Document Type and Number:
Japanese Patent JP3997719
Kind Code:
B2
More Like This:
Inventors:
Ari Kenshi
Application Number:
JP2001095143A
Publication Date:
October 24, 2007
Filing Date:
March 29, 2001
Export Citation:
Assignee:
Udina Device Co., Ltd.
International Classes:
G01B11/06; H01L21/66
Domestic Patent References:
| JP2001021317A | ||||
| JP9119900A | ||||
| JP2000280397A | ||||
| JP11189388A | ||||
| JP2000171212A | ||||
| JP11316187A |
Foreign References:
| US5936734 | ||||
| WO2001020254A1 |
Attorney, Agent or Firm:
Tetsuo Hirado