Title:
FINE MOVEMENT DEVICE UTILIZING IMPULSIVE FORCE GENERATED BY THERMAL DEFORMATION OF THERMAL DEFORMATION ELEMENT
Document Type and Number:
Japanese Patent JP3425162
Kind Code:
B2
Abstract:
PURPOSE: To provide accurate fine movement with simple constitution by wirelessly supplying heat to a thermal deformation element.
CONSTITUTION: This device is provided with a moving body 3 mounted on a base 1, a thermal deformation element 4 fitted to the moving body 3 and an inertial body 5 connected to the element 4. When the thermal deformation element 4 is irradiated by a laser beam 6 from the outside, the element 4 is abruptly deformed to effect on the inertial body 5 to apply large impulsive force between the element 4 and the moving body 3 so as to finely move the body 3 on a sliding face 2 of the base 1.
Inventors:
Toshiro Higuchi
Application Number:
JP17399492A
Publication Date:
July 07, 2003
Filing Date:
July 01, 1992
Export Citation:
Assignee:
Kanagawa Academy of Science and Technology
International Classes:
F03G7/06; B81B3/00; B81B5/00; H02N11/00; (IPC1-7): F03G7/06; H02N11/00
Domestic Patent References:
| JP63299785A |
Attorney, Agent or Firm:
Mamoru Shimizu