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Title:
FLUID HANDING DEVICE, AND METHOD FOR MANUFACTURING FLUID HANDING DEVICE
Document Type and Number:
Japanese Patent JP2016107251
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a fluid handing device in which a plurality of substrates are appropriately jointed without changing the shape of a flow channel.SOLUTION: A fluid handing device has: a resin-made first substrate in which a groove is formed on a first surface; a resin-made first film which is jointed to the first surface of the first substrate; a resin-made second film in which the first surface is jointed to a second surface in a front-rear relationship with the first surface of the first substrate; and a resin-made second substrate which is jointed to a second surface in a front-rear relationship with the first surface of the second film. A recess which is overlapped with the groove when seen in plan view is formed on a surface of the second substrate jointed to the second film. Glass transition temperature Tgof the first substrate, glass transition temperature Tgof the first film, glass transition temperature Tgof the second substrate, and glass transition temperature Tgof the second film satisfy Tg, Tg>Tg, Tg.SELECTED DRAWING: Figure 2

Inventors:
SUNAGA SHINYA
MURAKI KOJI
Application Number:
JP2014250262A
Publication Date:
June 20, 2016
Filing Date:
December 10, 2014
Export Citation:
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Assignee:
ENPLAS CORP
International Classes:
B01J19/00; B29C65/02; G01N35/08; G01N37/00
Domestic Patent References:
JP2007136292A2007-06-07
JP2013010076A2013-01-17
JPH09502795A1997-03-18
Foreign References:
WO2014027435A12014-02-20
WO2012011262A12012-01-26
Attorney, Agent or Firm:
Koichi Washida