Title:
フッ素含有ガスの分解除去剤、その製造方法と、それを使用したフッ素含有ガス除去方法、及びフッ素資源を回収する方法
Document Type and Number:
Japanese Patent JP6732694
Kind Code:
B2
Abstract:
The present invention relates to a fluorine-containing gas removing agent comprising an alumina and an alkali earth metal compound, wherein an ammonia desorption curve obtained by an ammonia TPD-MS method having a mass-to-charge ratio of 15 has a peak in a range lower than 200° C. and has a shoulder in a range of 200° C. or higher.
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Inventors:
Naohi Nakajima
Kim Won
Kim Won
Application Number:
JP2017118270A
Publication Date:
July 29, 2020
Filing Date:
June 16, 2017
Export Citation:
Assignee:
Clariant Catalyst Co., Ltd.
International Classes:
B01J23/02; B01D53/14; B01D53/68; B01D53/70; B01D53/81; B01D53/86; B01J20/08; B01J20/28; B01J20/30; B01J37/04
Domestic Patent References:
| JP2002224565A | ||||
| JP2001190959A | ||||
| JP2010158619A |
Foreign References:
| GB2295101A |
Other References:
HATTORI Kei, et al.,High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism,Japanese Journal of Applied Physics,2011年,Vol.50,Page.117301.1-117301.8,ISSN 0021-4922
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Katsunori Uenishi
Ichiro Torayama
Blacksmith
Katsunori Uenishi
Ichiro Torayama