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Title:
FOCUS DETECTOR
Document Type and Number:
Japanese Patent JP2001296469
Kind Code:
A
Abstract:

To provide a focus detector which is hardly affected by scattering at an edge part such as a step and by which not only focusing at an average height for plural uneven shapes having different height is performed but also that at a specified height is performed.

In the focus detector constituted of a light source 4, a collimating lens 5, a light-shielding plate 7, a polarized beam splitter 8, an image formation lens 13 and a photodetector 14, plural luminous fluxes are generated by arranging a diffraction grating 6 between the light source 4 and the polarized beam splitter 8, so that a sample is irradiated at multi-spots. Also, the diffraction grating 6 is inserted and withdrawn into/from an optical path, so that the sample is irradiated either the multi-spots or a single spot.


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JP2004101909CAMERA
Inventors:
FUJIMOTO YASUSHI
YONEYAMA TAKASHI
ENDO HIDEAKI
AMANO YUSUKE
Application Number:
JP2000112388A
Publication Date:
October 26, 2001
Filing Date:
April 13, 2000
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
G02B7/28; G02B21/26; G02B27/40; G02B5/18; (IPC1-7): G02B7/28; G02B5/18; G02B21/26
Domestic Patent References:
JPH10288733A1998-10-27
JPH11134675A1999-05-21
JPS6299922A1987-05-09
JP2000275027A2000-10-06
JP2001284240A2001-10-12
JPH1152224A1999-02-26
JPH05325200A1993-12-10
JPH08254650A1996-10-01
JPH11337812A1999-12-10



 
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