Title:
FORCE SENSOR DEVICE AND ROBOT ARM
Document Type and Number:
Japanese Patent JP2023151154
Kind Code:
A
Abstract:
To reduce sensor chip output variation caused by stress that arises when attaching a force sensor device to a fixing target.SOLUTION: A force sensor device includes: a first member comprising a sensor chip, a sensor chip mount with multiple first contact parts for mounting the sensor chip, a cylindrical part coupled to a first fixed part, and a flange protruding from the cylindrical part and having bolt holes formed thereon; and a second member comprising second contact parts to be in contact with the sensor chip, a support part for supporting the second contact parts, a second beam extending radially from the support part, and a second fixed part coupled to the second beam and fixed to the first fixed part. The flange has contact surfaces protruding beyond an end face of the cylindrical part.SELECTED DRAWING: Figure 2
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| WO/2005/091127 | SIGNAL PROCESSOR |
Inventors:
SUGANUMATA MASAYUKI
Application Number:
JP2022060607A
Publication Date:
October 16, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
MINEBEAMITSUMI INC
International Classes:
G01L5/16; B25J19/02
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito