Title:
FORCE SENSOR DEVICE
Document Type and Number:
Japanese Patent JP2023151155
Kind Code:
A
Abstract:
To reduce sensor chip output variation caused by stress that arises when attaching a force sensor device to a fixing target.SOLUTION: A force sensor device includes: a first member comprising a sensor chip, a sensor chip mount, a first beam extending from the sensor chip mount in a radial direction of a virtual circle centered at the sensor chip mount, and a first fixed part coupled to the first beam; and a second member comprising second contact parts to be in contact with the sensor chip, a support part for supporting the second contact parts, a second beam extending radially from the support part, and a second fixed part coupled to the second beam. The first beam includes a first portion extending radially from the sensor chip mount and a second portion extending in a direction crossing the radial direction, and the second beam includes a first portion extending radially from the support part and a second portion extending in a direction crossing the radial direction. The first portion of the second beam is disposed at a position overlapping the first portion of the first beam, and the second portion of the second beam is disposed at a position overlapping the second portion of the first beam.SELECTED DRAWING: Figure 6
Inventors:
YAMAGUCHI SHINYA
Application Number:
JP2022060608A
Publication Date:
October 16, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
MINEBEAMITSUMI INC
International Classes:
G01L5/16
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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