FORMATION OF HIGH-TEMPERATURE SUPERCONDUCTING MULTILAYER INTEGRATED CIRCUIT AND HIGH-TEMPERATURE SUPERCONDUCTING MULTILAYER INTEGRATED CIRCUIT

Title:

FORMATION OF HIGH-TEMPERATURE SUPERCONDUCTING MULTILAYER INTEGRATED CIRCUIT AND HIGH-TEMPERATURE SUPERCONDUCTING MULTILAYER INTEGRATED CIRCUIT

Document Type and Number:

Japanese Patent JP2959439

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To form a high-temperature superconducting multilayer integrated circuit of a structure, wherein the epitaxial performance of an uppermost layer high- temperature superconducting film and lower layer high-temperature superconducting films is easy to deteriorate due to a surface damage in a processing process, the more the disarrangement of the epitaxial property goes to the upper layers, the more it is increased and the degree of a reduction in the superconducting characteristics of the high-temperature superconducting film and the insulation characteristics of the insulating films is increased.
SOLUTION: Lower layer high-temperature superconducting films 21 and 23 and insulating films 22 and 24 are subjected to continuous epitaxial growth on a substrate 20 in the same vacuum excluding the uppermost layer high-temperature superconducting film 31, whereby a film, which is superior in epitaxial property, is formed. After a plurality of times of processings are performed on this multilayer epitaxial film, the film 31 is epitaxially grown. The connection between the film 31 and the films 21 and 23 and the connection between the films 21 and 23 are respectively made through contact holes 28 and 29 utilizing the film 31 and utilizing an edge bonding.

More Like This:

JPH10505572	INDUSTRIAL APPLICABILITY The superconducting composition at very high temperature and atmospheric pressure and the method for producing and using the composition.
JPH01194952	APPARATUS FOR CONCENTRATING SUPERCONDUCTIVE PHASE
JP3385771	SUPERCONDUCTING MAGNETIC BEARING DEVICE

Inventors:

HIDAKA MUTSUO

Application Number:

JP17736795A

Publication Date:

October 06, 1999

Filing Date:

July 13, 1995

Export Citation:

Click for automatic bibliography generation Help