Title:
FORMATION OF TRANSPARNT CONDUCTIVE FILM
Document Type and Number:
Japanese Patent JP2878615
Kind Code:
B2
Abstract:
PURPOSE: To form an SnO2 film uniform in thickness while preventing the infiltration of SnO2 into the rear of a glass substrate and to obviate the deposition of the contaminant of a belt on the substrate and the damage of the substrate.
CONSTITUTION: A glass substrate 3 is placed on a conveyor belt 1 and conveyed, and an SnO2 film as a transparent conductive film is formed on the substrate 3 by thermal CVD. A heat-resistant sheet 2 having a larger area than the substrate and consisting of a fire insulating fiber for high temp. is inserted between the belt 1 and substrate 3 to improve the yield.
Inventors:
MATSUMI SHIN
HAKU HISAO
NISHIWAKI HIDENORI
HAKU HISAO
NISHIWAKI HIDENORI
Application Number:
JP3837295A
Publication Date:
April 05, 1999
Filing Date:
February 27, 1995
Export Citation:
Assignee:
SANYO DENKI KK
International Classes:
C23C16/40; C03C17/245; C23C16/44; H01L31/04; (IPC1-7): C23C16/40; C03C17/245; C23C16/44; H01L31/04
Attorney, Agent or Firm:
Torii Hiroshi
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